Wavelet phase evaluation of white light interferograms

Sarac Z. , Dursun A., Yerdelen S., Ecevit F.

MEASUREMENT SCIENCE AND TECHNOLOGY, vol.16, no.9, pp.1878-1882, 2005 (Journal Indexed in SCI) identifier identifier

  • Publication Type: Article / Article
  • Volume: 16 Issue: 9
  • Publication Date: 2005
  • Doi Number: 10.1088/0957-0233/16/9/021
  • Title of Journal : MEASUREMENT SCIENCE AND TECHNOLOGY
  • Page Numbers: pp.1878-1882

Abstract

The surface profile of a rough object is obtained by white light interferometry. The real and noisy simulated correlograms are analysed by using sliding average, continuous wavelet transform and a new algorithm that is called the continuous wavelet transform phase method. Measurement repeatability is calculated for each algorithm and it has been shown that the continuous wavelet transform phase method gives a smaller peak to valley value and standard deviation than other methods. Hence, this algorithm can be used to obtain a good repeatability or standard deviation in white light interferometry.