The Coin-Gap nano-Schottky diodes have been fabricated to investigate effect of annealing temperature on the characteristics of the device. DC Magnetron sputtering technique has been used for Co metallic contact. The samples have been annealed for three minutes at 400 degrees C and 600 degrees C. XRD analyzes of the devices subjected to thermal annealing process have been investigated. Surface images have been taken with atomic force microscopy (AFM) in order to examine the morphology of the surface of the metal layer before and after the annealing the sample. The current-voltage (I-V) measurements taken at room temperature have shown that the ideality factor and series resistance decrease with the increasing annealing temperature. The ideality factor was found to be 1.02 for sample annealed at 400 degrees C. Before and after annealing, depending on the temperature measurement, the capacitance-frequency (C-f), and conductance-frequency (G-f) have been measured, and graphs have been plotted. (C) 2014 Elsevier Ltd. All rights reserved.